Ko te hangarau whakairo maroke tētahi o ngā tukanga matua. He rauemi matua te hau whakairo maroke i roto i te hanga hauāuru, ā, he puna hau nui hoki mō te whakairo plasma. Ka pā tika tōna mahi ki te kounga me te mahi a te hua whakamutunga. Ko te nuinga o tēnei tuhinga e whakapuaki ana i ngā hau whakairo e whakamahia whānuitia ana i roto i te tukanga whakairo maroke.
Ngā hau e ahu mai ana i te pūhaumāota: pērā itetrafluoride waro (CF4), hexafluoroethane (C2F6), trifluoromethane (CHF3) me te perfluoropropane (C3F8). Ka taea e ēnei hau te whakaputa i ngā fluoride pūngoikore i te wā e keri ana i te silicon me ngā matū silicon, ā, ka taea te tango rauemi.
Ngā hau e ahu mai ana i te hauota: pērā i te hauota (Cl2),te boron trichloride (BCl3)me te silicon tetrachloride (SiCl4). Ka taea e ngā hau e ahu mai ana i te chlorine te whakarato i ngā katote chloride i te wā o te tukanga whakairo, ka āwhina i te whakapai ake i te tere whakairo me te whiriwhiri.
Ngā hau e ahu mai ana i te pūromine: pērā i te pūromine (Br2) me te pūromine iodide (IBr). Ka taea e ngā hau e ahu mai ana i te pūromine te whakarato i te mahi whakairo pai ake i roto i ētahi tukanga whakairo, inā koa i te wā e whakairo ana i ngā rauemi mārō pērā i te silicon carbide.
Ngā hau e hangai ana ki te hauota me te hāora: pērā i te hauota trifluoride (NF3) me te hāora (O2). Ko ēnei hau e whakamahia ana hei whakatikatika i ngā āhuatanga tauhohenga i roto i te tukanga whakairo hei whakapai ake i te whiriwhiringa me te ahunga o te whakairo.
Mā ēnei hau ka tutuki te whakairo tika o te mata o te rauemi mā te whakakotahitanga o te pupuhi ā-tinana me ngā tauhohenga matū i te wā e whakairo ana i te plasma. Ko te kōwhiringa o te hau whakairo e whakawhirinaki ana ki te momo rauemi ka whakairohia, ngā whakaritenga whiriwhiri o te whakairo, me te tere whakairo e hiahiatia ana.
Te wā tuku: Hui-tanguru-08-2025
