Ka whakatakotoria te tungsten hexafluoride (WF6) ki runga i te mata o te papa whakarewa mā te tukanga CVD, ka whakakī i ngā awaawa hononga whakarewa, ā, ka hanga i te hononga whakarewa i waenga i ngā paparanga.
Me kōrero tātou mō te parāma i te tuatahi. Ko te parāma he momo matū e titoa ana i ngā irahiko kore utu me ngā iona kua utua. Kei te ao whānuitia, ā, e kiia ana ko te tuawhā o ngā āhua o te matū. Ka kiia ko te āhua parāma, e kiia ana hoki ko te "Parāma". He nui te kawe hiko o te parāma, ā, he kaha te hononga ki te papa hikohiko. He hau kua whaka-ionia te āhua, e titoa ana i ngā irahiko, ngā iona, ngā rauropi kore utu, ngā matūriki koretake, me ngā photon. Ko te parāma he ranunga koretake hiko kei roto ngā matūriki hohe ā-tinana me te matū.
Ko te whakamārama māmā ko te mea i raro i te mahi a te pūngao nui, ka hinga te ngota i te kaha van der Waals, te kaha here matū me te kaha Coulomb, ā, ka puta he momo hiko kūpapa katoa. I taua wā anō, ka hinga te pūngao nui e tukuna ana e te taha waho i ngā kaha e toru o runga ake nei. Ko te mahi, ngā irahiko me ngā katote e whakaatu ana i te āhua kore utu, ka taea te whakamahi horihori i raro i te whakarerekētanga o te papa aukume, pērā i te tukanga whakairo haurua-ira, te tukanga CVD, te tukanga PVD me te IMP.
He aha te pūngao teitei? I roto i te ariā, ka taea te whakamahi i te RF pāmahana teitei me te auau teitei. I te nuinga o te wā, he tata kore e taea te whakatutuki i te pāmahana teitei. He tino teitei rawa tēnei whakaritenga pāmahana, ā, tera pea e tata ana ki te pāmahana o te rā. Ko te tikanga he tino kore e taea te whakatutuki i roto i te tukanga. Nō reira, ko te tikanga ka whakamahia e te umanga te RF auau teitei hei whakatutuki. Ka taea e te RF plasma te eke ki te 13MHz+.
Ka whakapūmautia te tungsten hexafluoride i raro i te mahi a te papa hiko, kātahi ka whakatakotoria ki te kohu e te papa aukume. He rite ngā ngota W ki ngā huruhuru kūtai hotoke, ā, ka taka ki te whenua i raro i te mahi a te kaha ā-papa. Mārire, ka whakatakotoria ngā ngota W ki roto i ngā kōhao, ā, ka whakakīia ki ngā kōhao hei hanga hononga whakarewa. Haunga te whakatakoto i ngā ngota W ki roto i ngā kōhao, ka whakatakotoria anō hoki ki te mata o te Wafer? Ae, tino. I te nuinga o te wā, ka taea e koe te whakamahi i te tukanga W-CMP, koinei te mea e kiia nei e mātou ko te tukanga huri miihini hei tango. He rite ki te whakamahi i te puruma hei horoi i te papa i muri i te hukarere matotoru. Ka horoia atu te hukarere i runga i te whenua, engari ka noho tonu te hukarere i roto i te kōhao i runga i te whenua. Ki raro, tata rite tonu.
Wā tuku: Hakihea-24-2021
