He hau te whanariki hexafluoride he tino pai ngā āhuatanga ārai, ā, he maha ngā wā e whakamahia ana i roto i ngā tinei hiko me ngā whakawhiti hiko ngaohiko teitei, ngā raina tuku hiko ngaohiko teitei, ngā whakawhiti hiko, me ētahi atu. Heoi, i tua atu i ēnei mahi, ka taea hoki te whakamahi i te whanariki hexafluoride hei mea whakairo hiko. Ko te whanariki hexafluoride parakore teitei o te kounga hiko he mea whakairo hiko tino pai, e whakamahia whānuitia ana i roto i te ao hangarau hiko moroiti. I tēnei rā, ka whakaatuhia e te ētita hau motuhake a Niu Ruide, a Yueyue, te tono o te whanariki hexafluoride i roto i te whakairo silicon nitride me te awe o ngā tawhā rerekē.
Ka matapakihia e mātou te tukanga whakairo SiNx i roto i te plasma SF6, tae atu ki te whakarerekē i te mana plasma, te ōwehenga hau o te SF6/He me te tāpiri i te hau cationic O2, te matapaki i tōna awe ki te tere whakairo o te paparanga tiaki huānga SiNx o te TFT, me te whakamahi i te irahiko plasma. Ka tātarihia e te ine ira ngā huringa kukū o ia momo i roto i te SF6/He, te plasma SF6/He/O2 me te tere wetewete SF6, ā, ka tūhuratia te whanaungatanga i waenga i te huringa o te tere whakairo SiNx me te kukū momo plasma.
Kua kitea e ngā rangahau, ina whakanuia te mana o te plasma, ka piki ake te tere o te keri; ki te whakanuia te tere rere o te SF6 i roto i te plasma, ka piki ake te kukū o te ngota F, ā, he hononga pai ki te tere keri. Hei tāpiri, i muri i te tāpiri i te hau cationic O2 i raro i te tere rere katoa kua whakaritea, ka hua ake te whakanui ake i te tere keri, engari i raro i ngā ōwehenga rere O2/SF6 rerekē, ka rerekē ngā tikanga tauhohenga, ka taea te wehewehe kia toru ngā wāhanga: (1) He tino iti te ōwehenga rere O2/SF6, ka taea e O2 te āwhina i te wehenga o SF6, ā, he nui ake te tere keri i tēnei wā i te wā kāore i tāpirihia te O2. (2) Ina nui ake te ōwehenga rere O2/SF6 i te 0.2 ki te wā e tata ana ki te 1, i tēnei wā, nā te nui o te wehenga o SF6 ki te hanga ngota F, ko te tere keri te mea teitei rawa; engari i taua wā anō, kei te piki haere hoki ngā ngota O i roto i te plasma, ā, he māmā noa te hanga i te SiOx, i te SiNxO(yx) rānei me te mata kiriata SiNx, ā, ka piki ake ngā ngota O, ka uaua ake te tauhohenga whakairo mō ngā ngota F. Nō reira, ka tīmata te puhoi o te tere whakairo ina tata te ōwehenga O2/SF6 ki te 1. (3) Ina nui ake te ōwehenga O2/SF6 i te 1, ka heke te tere whakairo. Nā te pikinga nui o te O2, ka tukinga ngā ngota F kua wehea ki te O2, ā, ka hanga i te OF, ka whakaiti i te kukū o ngā ngota F, ka heke te tere whakairo. Ka kitea mai i tēnei ina tāpirihia te O2, ko te ōwehenga rere o te O2/SF6 kei waenganui i te 0.2 me te 0.8, ā, ka taea te whiwhi i te tere whakairo pai rawa atu.
Wā tuku: Hakihea-06-2021
