Ko ngā hau hiko motuhake kei roto i te fluorine ko:te whanariki hexafluoride (SF6), tungsten hexafluoride (WF6),tetrafluoride waro (CF4), te trifluoromethane (CHF3), te hauota trifluoride (NF3), te hexafluoroethane (C2F6) me te octafluoropropane (C3F8).
I te whanaketanga o te nanotechnology me te whanaketanga nui o te umanga hikohiko, ka piki ake te tono i ia rā, i ia rā. Ko te hauota trifluoride, he hau hiko motuhake e tino hiahiatia ana, e whakamahia nuitia ana hoki i roto i te hanga me te tukatuka i ngā panera me ngā hau haurua-ira, he whānui te wāhi mākete.
Hei momo hau motuhake kei roto he wheori,hauota toru-pūhaumāota (NF3)Ko te hua hau hiko motuhake te mea nui rawa atu te kaha o te mākete. He koretake te matū i te pāmahana rūma, he kaha ake i te hāora i te pāmahana teitei, he pumau ake i te fluorine, ā, he ngāwari ki te whakahaere. Ko te hauota trifluoride te nuinga o te wā e whakamahia ana hei hau whakairo plasma me te kaihoko horoi rūma tauhohenga, ā, he pai mō ngā mara hanga maramara semiconductor, ngā whakaaturanga papatahi, ngā muka whatu, ngā pūtau photovoltaic, me ētahi atu.
Ki te whakatauritea ki ētahi atu hau hiko kei roto he fluorine,hauota toru-pūhaumāotaHe tere te tauhohenga me te tino whai huatanga o tēnei rauemi. Ina koa i roto i te whakairo i ngā rauemi kei roto te silicon pērā i te silicon nitride, he tere te whakairo me te whiriwhiri, kāore he toenga e toe ana i runga i te mata o te mea whakairo. He tino pai hoki te horoi, ā, kāore he poke ki te mata, ka taea ai te whakatutuki i ngā hiahia o te tukanga tukatuka.
Wā tuku: Hepetema-14-2024
