Ko nga hau hiko motuhake kei roto ko te fluorine kei rotowhanariki hexafluoride (SF6), tungsten hexafluoride (WF6),waro tetrafluoride (CF4), trifluoromethane (CHF3), hauota trifluoride (NF3), hexafluoroethane (C2F6) me te octafluoropropane (C3F8).
Na te whanaketanga o te nanotechnology me te whanaketanga nui o te ahumahi hiko, ka piki ake tana hiahia i ia ra. Nitrogen trifluoride, he hau hiko motuhake e tino whakamahia ana mo te hanga me te tukatuka o nga panui me nga semiconductors, he waahi nui te maakete.
He momo hau motuhake kei roto i te fluorine,hauota trifluoride (NF3)Ko te hua hau motuhake hiko me te kaha nui o te maakete. He matū korekore i te pāmahana rūma, he kaha ake i te hāora i te pāmahana teitei, he pūmau atu i te fluorine, he ngawari ki te hapai. Ko te Nitrogen trifluoride te nuinga o te whakamahia hei hau etching plasma me te kaihoko horoi ruma tauhohenga, a he pai mo nga mara hangahanga o nga maramara semiconductor, whakaaturanga papahoa papa, muka whatu, pūtau photovoltaic, etc.
Ka whakatauritea ki etahi atu hau hiko e mau ana i te fluorine,hauota trifluoridehe painga o te tauhohenga tere me te tino pai. Ina koa i roto i te werohanga o nga taonga kei roto i te silicon penei i te nitride silicon, he nui te reiti o te tarai me te whiriwhiri, kaore he toenga i runga i te mata o te mea tarai. He tino pai te horoi horoi me te kore he parahanga ki te mata, ka taea te whakatutuki i nga hiahia o te tukanga tukatuka.
Te wa tuku: Sep-14-2024
