Kei te mau tonu te taumata tiketike o te angitu o te umanga haurua-waea me te umanga panera o tō tātou whenua. Ko te hauota trifluoride, he hau hiko motuhake e hiahiatia ana, e nui rawa ana te rahinga i roto i te hanga me te tukatuka i ngā panera me ngā haurua-waea, he whānui te wāhi mākete.
Ko ngā hau hiko motuhake kei roto te fluorine e whakamahia whānuitia ana kote whanariki hexafluoride (SF6), tungsten hexafluoride (WF6),tetrafluoride waro (CF4), trifluoromethane (CHF3), hauota trifluoride (NF3), hexafluoroethane (C2F6) me te octafluoropropane (C3F8). Ko te hauota trifluoride (NF3) te nuinga o te wā e whakamahia ana hei pūtake fluorine mō ngā taiaho matū pūngao-teitei o te hauwai fluoride-hau fluoride. Ko te wāhanga whai hua (tata ki te 25%) o te pūngao tauhohenga i waenga i te H2-O2 me te F2 ka taea te tuku mā te irahiko taiaho, nō reira ko ngā taiaho HF-OF ngā taiaho tino whai hua i waenga i ngā taiaho matū.
He hau whakairo plasma pai rawa atu te hauota trifluoride i roto i te umanga hikohiko moroiti. Mō te whakairo i te silicon me te silicon nitride, he nui ake te tere whakairo me te whiriwhiringa o te hauota trifluoride i te waro tetrafluoride me te ranunga o te waro tetrafluoride me te hāora, ā, kāore he parahanga ki te mata. Ina koa i roto i te whakairo o ngā rauemi ara iahiko whakauru he iti iho i te 1.5um te matotoru, he tino pai te tere whakairo me te whiriwhiringa o te hauota trifluoride, kāore he toenga e waiho ana i runga i te mata o te mea whakairo, ā, he tino pai hoki te kaihoko horoi. I te whanaketanga o te nanotechnology me te whanaketanga nui o te umanga hikohiko, ka piki ake te tono i ia rā, i ia rā.
Hei momo hau motuhake kei roto he fluorine, ko te hauota trifluoride (NF3) te hua hau motuhake hiko nui rawa atu i te mākete. He koretake te matū i te pāmahana rūma, he kaha ake i te hāora, he pumau ake i te fluorine, ā, he ngāwari ki te whakahaere i te pāmahana teitei.
Ko te hauota trifluoride e whakamahia nuitia ana hei hau whakairo plasma me te kaihoko horoi rūma tauhohenga, he mea tika mō ngā mara hangahanga pēnei i ngā maramara haurua-ira, ngā whakaaturanga papatahi, ngā muka whatu, ngā pūtau photovoltaic, me ētahi atu.
Ki te whakaritea ki ētahi atu hau hiko kei roto te fluorine, he tere te tauhohenga me te tino whai hua o te hauota trifluoride, inā koa i roto i te whakairo o ngā rauemi kei roto te silicon pēnei i te silicon nitride, he tere te whakairo me te whiriwhiri, kāore he toenga e toe ana i runga i te mata o te mea whakairo, ā, he tino pai hoki te horoi, ā, kāore e poke i te mata, ā, ka taea te whakatutuki i ngā hiahia o te tukanga tukatuka.
Wā tuku: Hakihea-26-2024
