Ko te ahumahi semiconductor o to tatou whenua me te umanga roopu kei te pupuri i te taumata teitei o te oranga. Nitrogen trifluoride, he hau hiko motuhake me te nui-nui i roto i te hanga me te tukatuka o nga panui me nga semiconductors, he waahi nui te maakete.
Ko nga hau hiko motuhake kei roto ko te fluorine kei rotowhanariki hexafluoride (SF6), tungsten hexafluoride (WF6),tetrafluoride waro (CF4), trifluoromethane (CHF3), hauota trifluoride (NF3), hexafluoroethane (C2F6) me te octafluoropropane (C3F8). Ko te Nitrogen trifluoride (NF3) te nuinga o te whakamahi hei puna fluorine mo te hauwai hauwai-fluoride hau teitei-kaha taiaho matū. Ko te waahanga whai hua (mo te 25%) o te kaha tauhohenga i waenga i te H2-O2 me te F2 ka taea te tukuna e te radiation laser, no reira ko nga laser HF-OF nga laser tino pai i waenga i nga laser matū.
Ko te Nitrogen trifluoride he hau etching plasma pai i roto i te ahumahi microelectronics. Mo te hiraka me te nitride silicon, ko te hauota trifluoride he teitei ake te reiti me te whiriwhiringa i te waro tetrafluoride me te ranunga o te tetrafluoride waro me te hāora, karekau he parahanga ki te mata. Ina koa i roto i te whakairo o nga rauemi taiawhio whakauru me te matotoru o te iti iho i te 1.5um, ko te hauota trifluoride he tino pai te reeti me te whiriwhiringa, kaore he toenga i runga i te mata o te mea taraihia, a he tino pai te horoi. Na te whanaketanga o te nanotechnology me te whanaketanga nui o te ahumahi hiko, ka piki ake tana hiahia i ia ra.
He momo hau motuhake kei roto i te fluorine, hauota trifluoride (NF3) te hua hau motuhake hiko nui rawa atu i te maakete. He matū korekore i te pāmahana rūma, he kaha ake i te hāora, he pūmau atu i te fluorine, he ngawari ki te hapai i te pāmahana teitei.
Ko te Nitrogen trifluoride te nuinga o te whakamahi hei hau etching plasma me te kaihoko horoi ruuma tauhohenga, e tika ana mo nga mara whakangao penei i nga maramara semiconductor, whakaaturanga papa papatahi, muka whatu, pūtau photovoltaic, etc.
Ka whakatauritea ki etahi atu hau hiko e mau ana i te fluorine, ko te hauota trifluoride nga painga o te tere tere me te kaha o te mahi, ina koa ki te tarai i nga taonga o te silicon-containing penei i te silicon nitride, he nui te reeti me te whiriwhiringa, kaore he toenga i runga i te mata o te mea taraihia, he pai rawa hoki te horoi horoi, a, kaore e taea te tukatuka i nga hiahia o te mata.
Wā tuku: Tihema-26-2024
