I roto i te tukanga hanga o ngā whare whakarewa wafer semiconductor me ngā tukanga whakaputa matatau, e tata ana ki te 50 ngā momo hau rerekē e hiahiatia ana. Ko te tikanga ka wehea ngā hau ki ngā hau papatipu me ngā haungā hau motuhake.

Te Whakamahinga o ngā Hau i roto i ngā Ahumahi Hikohiko Moroiti me te Hangarau-ā-Irahiko He mea nui tonu te whakamahinga o ngā hau i roto i ngā tukanga hangarau-ā-Irahiko, inā koa ko ngā tukanga hangarau-ā-Irahiko e whakamahia whānuitia ana i roto i ngā ahumahi maha. Mai i te ULSI, TFT-LCD ki te ahumahi hangarau-ā-Irahiko Moroiti (MEMS) o nāianei, ka whakamahia ngā tukanga hangarau-ā-Irahiko hei tukanga hanga hua, tae atu ki te whakairo maroke, te waikura, te whakatō katote, te whakatakoto kiriata angiangi, me ētahi atu.

Hei tauira, he tokomaha te hunga e mōhio ana he mea hanga ngā maramara ki te onepu, engari ki te tirohia te tukanga katoa o te hanga maramara, he nui ake ngā rauemi e hiahiatia ana, pērā i te photoresist, te wai whakakanapa, te rauemi ūnga, te hau motuhake, me ētahi atu mea e tino hiahiatia ana. Me whai papa, papa whakarunga, anga mata, rauemi here, me ētahi atu mea o ngā momo rauemi mō te takai o muri. Ko ngā hau motuhake hiko te tuarua o ngā rauemi nui rawa atu i roto i ngā utu hanga semiconductor i muri i ngā papa silicon, ā, whai muri ko ngā kopare me ngā photoresist.

He pānga nui tō te parakore o te hau ki te mahi a ngā wāhanga me te hua o te hua, ā, e pā ana te haumaru o te tuku hau ki te hauora o ngā kaimahi me te haumaru o te mahi wheketere. He aha te pānga nui o te parakore o te hau ki te raina tukanga me ngā kaimahi? Ehara tēnei i te whakanui rawa, engari e whakatauhia ana e ngā āhuatanga morearea o te hau tonu.

Te whakarōpūtanga o ngā hau noa i roto i te umanga haurua-ira

Hau Noa

Ka kiia hoki te hau noa ko te hau papatipu: e pā ana ki te hau ahumahi he iti iho i te 5N te whakaritenga parakore, ā, he nui te rahinga whakaputa me te hoko. Ka taea te wehewehe ki te hau wehewehe hau me te hau hangai i runga i ngā tikanga whakarite rerekē. Hauwai (H2), hauota (N2), hāora (O2), ākona (A2), me ētahi atu;

Hau Motuhake

Ko te hau motuhake e pā ana ki te hau ahumahi e whakamahia ana i roto i ngā mara motuhake, ā, he whakaritenga motuhake mō te parakore, te momo, me ngā āhuatanga. Ko te nuingaSiH4, PH3, B2H6, A8H3,HCL, CF4,NH3, POCL3, SIH2CL2, SIHCL3,NH3, BCL3, SIF4, CLF3, CO, C2F6, N2O, F2, HF, HBR,SF6… ā, pērā tonu.

Ngā momo hau motuhake

Ngā momo hau motuhake: waikura, paitini, mura, tautoko ahi, kore mahi, me ētahi atu.
Ko ngā hau haurua-ā-ira e whakamahia whānuitia ana ka whakarōpūtia penei:
(i) Waikura/paitini:HClBF3, WF6, HBr, SiH2Cl2, NH3, PH3, Cl2BCl3…
(ii) Ngāwari te mura: H2、CH4、SiH4、PH3,AsH3,SiH2Cl2,B2H6,CH2F2,CH3F,CO…
(iii) Ngā mea mura: O2,Cl2,N2O,NF3…
(iv) Ngāwari: N2、CF4C2F6C4F8、SF6CO2Ne、Kr、Ia…

I roto i te tukanga hanga maramara haurua-ira, e 50 ngā momo hau motuhake (e kiia nei ko ngā hau motuhake) e whakamahia ana i roto i te waikura, te horapa, te whakatakoto, te whakairo, te werohanga, te whakaahua-ipurangi me ētahi atu tukanga, ā, neke atu i te rau ngā mahi katoa o te tukanga. Hei tauira, ka whakamahia te PH3 me te AsH3 hei pūtake phosphorus me te arsenic i roto i te tukanga whakatō katote, ko ngā hau e ahu mai ana i te F ko te CF4, CHF3, SF6 me ngā hau halogen ko te CI2, BCI3, HBr e whakamahia whānuitia ana i roto i te tukanga whakairo, ko te SiH4, NH3, N2O i roto i te tukanga kiriata whakatakoto, ko te F2/Kr/Ne, Kr/Ne i roto i te tukanga whakaahua-ipurangi.

Mai i ngā āhuatanga o runga ake nei, ka taea e tātou te mārama he maha ngā hau hau-ā-ira he kino ki te tinana tangata. Ina koa, ko ētahi o ngā hau, pērā i te SiH4, ka mura ake i a ia anō. Mēnā ka turuturu, ka tauhohe kaha ki te hāora i te rangi, ka tīmata te mura; ā, he tino paitini te AsH3. Mā te turuturu iti ka pā he kino ki te oranga o te tangata, nō reira he tino teitei ngā whakaritenga mō te haumaru o te hoahoa pūnaha whakahaere mō te whakamahi i ngā hau motuhake.

Me whai "toru nekehanga" ngā hau parakore teitei mō ngā taputapu haurua-whakahaere.

Te parakore o te hau

Ko te nui o te poke o te hau i roto i te hau e whakaatuhia ana hei ōrau o te poke o te hau, pērā i te 99.9999%. I te nuinga o te wā, ko te whakaritenga poke mō ngā hau motuhake hiko ka eke ki te 5N-6N, ā, ka whakaatuhia hoki e te ōwehenga rōrahi o te ihirangi poke o te hau ppm (wāhanga mō ia miriona), ppb (wāhanga mō ia piriona), me te ppt (wāhanga mō ia tiriona). Ko te mara haurua-ārai hiko te mea e hiahiatia ana mō te poke me te pumau o te kounga o ngā hau motuhake, ā, ko te poke o ngā hau motuhake hiko he nui ake i te 6N.

Maroke

Ko te nui o te wai iti i roto i te hau, te makuku rānei, ka whakaaturia i roto i te ira tomairangi, pērā i te ira tomairangi o te āhuarangi -70℃.

Te horoi

Ko te maha o ngā matūriki poke i roto i te hau, arā, ko te rahi o te matūriki he µm, ka whakaaturia i roto i te maha o ngā matūriki/M3. Mō te hau kōpeke, ka whakaaturia i roto i te mg/m3 o ngā toenga totoka kāore e taea te karo, tae atu ki te ihirangi hinu.