Hauwai kōhaitaHe hau kore tae te hau, he kakara kino. Ko tōna wairewa ka kiia ko te waikawa hauwaiora, e mōhiotia ana ko te waikawa hauwaiora. He tino wairewa te hauwaiora hauwaiora i roto i te wai. I te 0°C, ka taea e te 1 rōrahi wai te wairewa i te 500 rōrahi hauwaiora hauwaiora.

Kei a ia ēnei āhuatanga me ōna āhuatanga e whai ake nei:

1. Teitei o te parakore

Te parakore o te karaehe hikohauwai kōhaitahe tino tiketike, i te nuinga o te wā i te taumata ppm, i raro iho rānei, kia kore ai he poke e whakaurua ki roto i te tukanga hanga haurua-waenga.

2. Te korekore

He hau kore-matū tēnei e kore e tauhohe ki ētahi atu matū, he mea tino nui tēnei hei ārai i te poke o ngā rauemi me ngā taputapu haurua-ira.

3. Te pumau teitei

Te taumata hikohauwai kōhaitahe matū pumau te nuinga hei whakarite kia pono te tukatuka haurua-haurua.

I roto i te tukatuka haurua-ā-ira, ko ngā whakamahinga matua o te hauwai pūhaumāota hiko ko:

1. Te horoi me te whakarite i te mata

Hei kaihoroi mata whai hua, he kounga hikohauwai kōhaitae whakamahia ana hei tango i ngā waikura me ngā poke mai i te mata o te papa hei whakarite i te kounga me te parakore o te paparanga epitaxial, te kiriata rānei.

2. Āwhina tipu epitaxial

Ka whakamahia hei kaihoko maimoatanga mata i roto i te tukanga epitaxial, ka āwhina i te whakapai ake i te kounga o te paparanga epitaxial, te whakapai ake i te taurite whatunga, me te whakaiti i te hanganga o ngā hapa whatunga.

3. Te maimoatanga o mua i te papa

I mua i te whakarite i ngā taputapu haurua-ā-ira, te karaehe hikohauwai kōhaitaka taea te whakamahi hei rongoā i te mata o te papa hei hanga i tētahi turanga pumau hei whakapai ake i te piri i waenga i te paparanga epitaxial me te papa.

4. Kaihoko āwhina tāpae

I roto i te tukanga whakatakotoranga kohu matū (CVD) me te whakatakotoranga kohu ā-tinana (PVD), ka taea te whakamahi i te hauwai pūhaumāota hiko hei reo whakawhiti hau hei whai wāhi ki te tauhohenga whakatakotoranga o ngā rauemi haurua-ira.

5. Kaihoko whakawhiti hau-āhuatanga

Hei kaihopu whakawhiti hau, ka whakaurua ētahi atu matū mua hau ki roto i te rūma tauhohenga hei āwhina i te whakarerekē i te tere whakatakotoranga me te ōritetanga o te rauemi.

Mā ēnei āhuatanga ka eke te taumata hiko ki te taumata teiteihauwai kōhaitahe kaihoko tukatuka nui i roto i te hangarau haurua-ā-ira, he pānga nui tōna ki te mahi me te pono o te taputapu whakamutunga.

Haunga tōna whakamahinga i roto i te tukatuka haurua-haurua, ka kitea te maha o ngā whakamahinga o te hauwai pūhaumāota hiko i roto i ētahi atu wāhanga, tae atu ki: Te whakarite rauemi parakore teitei, Ngā Pūtau Wahie, Te whakatipu rauemi haurua-haurua, Te Whakaahua Āhuatanga Kohu, Te Tātari Rauemi, Te Rangahau Matū.

I te nuinga o te wā, ko te taumata hikohauwai kōhaitahe hau maha ngā whakamahinga, he tino parakore, he whānuitanga ngā tono i tua atu i te hanga haurua-ā-ira.