Hau reera

Ko te hau reera te mea e whakamahia nuitia ana mō te whakamahana reera me te hau whakapūtanga i roto i te umanga hikohiko. Mā te auahatanga o ngā mata waea pūkoro me te whānui haere o ngā wāhi tono, ka whānui ake te tauine o te mākete polysilicon pāmahana-iti, ā, kua tino whakapai ake te tukanga whakamahana reera i te mahi a ngā TFT. I roto i ngā hau neon, fluorine, me te argon e whakamahia ana i roto i te reera excimer ArF mō te hanga semiconductors, neke atu i te 96% o te ranunga hau reera te neon. Nā te whakapainga o te hangarau semiconductor, kua piki ake te whakamahinga o ngā reera excimer, ā, nā te whakaurunga o te hangarau whakaaturanga rua kua piki ake te hiahia mō te hau neon e pau ana i ngā reera excimer ArF. Mā te whakatairanga i te rohe o ngā hau motuhake hiko, ka pai ake te tipu o te mākete a ngā kaihanga o roto i te heke mai.

Ko te mīhini whakairo te taputapu matua o te hanga haurua-haurua. Ko te whakairo te mea e whakatau ana i te rahi o ngā transistors. Ko te whanaketanga tahi o te mekameka ahumahi whakairo te mea nui ki te putanga hou o te mīhini whakairo. He nui te ihirangi hangarau o ngā rauemi haurua-haurua e rite ana pērā i te photoresist, te hau whakairo, te photomask, me ngā taputapu paninga me te whakawhanake. Ko te hau whakairo te hau e whakaputahia ana e te mīhini whakairo i te laser ultraviolet hohonu. Ka taea e ngā hau whakairo rerekē te whakaputa i ngā pūtake mārama o ngā roangaru rerekē, ā, ka pā tika ō rātou roangaru ki te taumira o te mīhini whakairo, ko tētahi o ngā matua o te mīhini whakairo. I te tau 2020, ko te tapeke o ngā hokonga mīhini whakairo o te ao ka eke ki te 413 waeine, ko te 62% o ngā hokonga ASML 258 waeine, 30% o ngā hokonga Canon 122 waeine, ā, 8% o ngā hokonga Nikon 33 waeine.