Ngā hau motuhakererekē i te whānuingā hau ahumahinā te mea he whakamahinga motuhake ā rātou, ā, e whakamahia ana i roto i ngā mara motuhake. He whakaritenga motuhake ā rātou mō te parakore, te nui o te poke, te hanganga, me ngā āhuatanga ā-tinana me te matū. Ki te whakatauritea ki ngā hau ahumahi, he rerekē ake ngā momo o ngā hau motuhake engari he iti ake te nui o te whakaputa me te hoko.

Tengā hau whakaranumengā hau whakatikatika paerewaKo ngā hau motuhake e whakamahia whānuitia ana e tātou he wāhanga nui. Ko ngā hau whakaranu ka wehea ki ngā hau whakaranu whānui me ngā hau whakaranu hiko.

Ko ngā hau whakaranu whānui ko:hau whakaranu laser, hau whakauru mō te kimi taputapu, hau whakauru mō te whakarewa, hau whakauru mō te tiaki, hau whakauru mō te pūtake rama hiko, hau whakauru mō te rangahau hauora me te koiora, hau whakauru mō te patu huakita me te whakahoromata, hau whakauru mō te whakaoho taputapu, hau whakauru mō te pēhanga teitei, me te hau kore-papa.

Kei roto i ngā ranunga hau hiko ngā ranunga hau epitaxial, ngā ranunga hau whakatakotoranga kohu matū, ngā ranunga hau tāpiri, ngā ranunga hau whakairo, me ētahi atu ranunga hau hiko. He mea nui te mahi a ēnei ranunga hau i roto i ngā ahumahi haurua-ira me ngā hiko iti, ā, e whakamahia whānuitia ana i roto i te hanga porowhita whakauru nui (LSI) me te porowhita whakauru tino nui (VLSI), tae atu ki te hanga taputapu haurua-ira.

E 5 ngā momo hau hiko e whakamahia whānuitia ana

Te whakakī i te hau whakaranu

I roto i te hanga o ngā taputapu haurua-ira me ngā ara iahiko whakauru, ka whakaurua ētahi poke ki roto i ngā rauemi haurua-ira hei hoatu i te kawe hiko me te ātete e hiahiatia ana, e āhei ai te hanga i ngā ātete, ngā hononga PN, ngā paparanga tanumia, me ētahi atu rauemi. Ko ngā hau e whakamahia ana i roto i te tukanga tāpiri ka kiia he hau tāpiri. Ko te nuinga o ēnei hau ko te arsine, te phosphine, te phosphorus trifluoride, te phosphorus pentafluoride, te arsenic trifluoride, te arsenic pentafluoride,pūtoru-pūhaumāota, me te diborane. Ko te pūtake tāpiri ka konatunatua ki te hau kawe (pērā i te argon me te hauota) i roto i te kāpata pūtake. Kātahi ka werohia tonutia te hau whakaranu ki roto i te oumu horapa, ka huri haere i te wafer, ka whakatakotoria te tāpiri ki runga i te mata o te wafer. Kātahi ka tauhohe te tāpiri ki te silicon hei hanga i te konganuku tāpiri ka heke ki roto i te silicon.

Ranunga hau tipu epitaxial

Ko te tipu epitaxial te tukanga whakatakoto me te whakatipu i tētahi rauemi tioata kotahi ki runga i tētahi mata o te papa. I roto i te umanga semiconductor, ko ngā hau e whakamahia ana hei whakatipu i tētahi, i ētahi atu paparanga rānei o te rauemi mā te whakamahi i te whakatakoto kohu matū (CVD) ki runga i tētahi papa kua whiriwhiria kia āta tirohia, ka kiia ko ngā hau epitaxial. Ko ngā hau epitaxial silicon noa ko te dihydrogen dichlorosilane, te silicon tetrachloride, me te silane. Ko te nuinga o ēnei e whakamahia ana mō te whakatakoto silicon epitaxial, te whakatakoto silicon polycrystalline, te whakatakoto kiriata silicon oxide, te whakatakoto kiriata silicon nitride, me te whakatakoto kiriata silicon amorphous mō ngā pūtau rā me ētahi atu taputapu photosensitive.

Hau whakatō katote

I roto i te hanga taputapu haurua-ira me te ara iahiko whakauru, ko ngā hau e whakamahia ana i roto i te tukanga whakauru katote ka kiia ko ngā hau whakauru katote. Ka whakaterea ngā poke katote (pērā i te boron, te phosphorus, me ngā katote arsenic) ki tētahi taumata pūngao teitei i mua i te whakauru ki roto i te papa. Ko te hangarau whakauru katote te mea e whakamahia whānuitia ana hei whakahaere i te ngaohiko paepae. Ka taea te whakatau i te nui o ngā poke kua whakaurua mā te ine i te ia o te hihi katote. Ko ngā hau whakauru katote kei roto ko te phosphorus, te arsenic, me ngā hau boron.

Te whakairo i te hau whakaranu

Ko te whakairo he tukanga whakairo i te mata kua tukatukahia (pēnei i te kiriata whakarewa, te kiriata silicon oxide, me ētahi atu) i runga i te papa kāore i hipokina e te photoresist, me te pupuri tonu i te wāhi kua hipokina e te photoresist, kia whiwhi ai i te tauira whakaahua e hiahiatia ana i runga i te mata o te papa.

Ranunga Hau Whakatakotoranga Kohu Matū

Ka whakamahia e te matū whakapūngao kohu (CVD) ngā matū pūngao hei whakapūnga i tētahi matū, i tētahi matū rānei mā te tauhohenga matū āhua-kohu. He tikanga hanga kiriata tēnei e whakamahi ana i ngā tauhohenga matū āhua-kohu. Ka rerekē ngā hau CVD e whakamahia ana i runga i te momo kiriata e hangaia ana.