Epitaxial (tipu)Ga Whakaranus

I roto i te umanga haurua-ira, ko te hau e whakamahia ana hei whakatipu i tētahi, i ētahi atu paparanga rānei o te rauemi mā te whakatakotoranga kohu matū ki runga i tētahi papa kua tīpakohia kia tupato, ka kiia ko te hau epitaxial.

Ko ngā hau epitaxial silicon e whakamahia whānuitia ana ko te dichlorosilane, te silicon tetrachloride mesilane. E whakamahia ana mō te whakatakoto i te silicon epitaxial, te whakatakoto i te kiriata silicon oxide, te whakatakoto i te kiriata silicon nitride, te whakatakoto i te kiriata silicon amorphous mō ngā pūtau rā me ētahi atu photoreceptors, me ētahi atu. Ko te epitaxy he tukanga e whakatakotoria ai he rauemi tioata kotahi, ka whakatipuria ki te mata o te papa.

Te Whakatakotoranga Kohu Matū (CVD) Hau Whakaranu

Ko te CVD he tikanga whakatakoto i ētahi huānga me ngā matū mā te whakamahi i ngā tauhohenga matū āhua hau mā te whakamahi i ngā matū pūngāwerewere, arā, he tikanga hanga kiriata mā te whakamahi i ngā tauhohenga matū āhua hau. He rerekē anō hoki te hau whakatakoto kohu matū (CVD) e whakamahia ana, i runga i te momo kiriata i hangaia.

Te whakamahi i te tarukinoHau Whakaranu

I roto i te hanga o ngā taputapu haurua-ira me ngā ara iahiko whakauru, ka tāpirihia ētahi poke ki roto i ngā rauemi haurua-ira hei hoatu i te momo kawe hiko e hiahiatia ana me te ātete ki ngā rauemi hei hanga i ngā ātete, ngā hononga PN, ngā paparanga huna, me ētahi atu. Ko te hau e whakamahia ana i roto i te tukanga tāpiri ka kiia ko te hau tāpiri.

Kei roto i te nuinga o te wā ko te arsine, te phosphine, te phosphorus trifluoride, te phosphorus pentafluoride, te arsenic trifluoride, te arsenic pentafluoride,pūtoru-pūhaumāota, diborane, etc.

I te nuinga o te wā, ka konatunatua te pūtake tāpiringa ki te hau kawe (pērā i te argon me te hauota) i roto i te kāpata pūtake. I muri i te whakaranu, ka werohia tonutia te rere o te hau ki roto i te oumu horapa, ka karapoti i te wafer, ka whakatakoto i ngā tāpiringa ki runga i te mata o te wafer, kātahi ka tauhohe ki te silicon hei whakaputa i ngā konganuku tāpiringa ka heke ki te silicon.

Te whakairoRanunga Hau

Ko te whakairo he whakairo i te mata tukatuka (pēnei i te kiriata whakarewa, te kiriata hākawa silicon, me ētahi atu) i runga i te papa, me te kore e hipokina te ātete-whakaahua, me te tiaki tonu i te wāhi mā te hipoki ātete-whakaahua, kia whiwhi ai i te tauira whakaahua e hiahiatia ana i runga i te mata o te papa.

Ko ngā tikanga whakairo ko te whakairo matū mākū me te whakairo matū maroke. Ko te hau e whakamahia ana i roto i te whakairo matū maroke ka kiia ko te hau whakairo.

Ko te hau whakairo he hau fluoride (halide) te nuinga, pērā i tetetrafluoride waro, hauota trifluoride, trifluoromethane, hexafluoroethane, perfluoropropane, me ētahi atu