Te toru-kōrorā o te pūroni (BCl3)He matū kore-waro te hau e whakamahia whānuitia ana i roto i te whakairo maroke me ngā tukanga whakatakoto kohu matū (CVD) i roto i te hanga haurua-haurua. He hau kore tae me te kakara kaha i te pāmahana rūma, ā, he tairongo ki te hau makuku nā te mea ka waiora hei whakaputa waikawa hauwaiora me te waikawa boric.

Ngā Whakamahinga o te Boron Trichloride

I roto i te umanga haurua-ira,Poroni trichloridee whakamahia ana mō te whakairo maroke o te konumohe, hei tāpiringa hoki hei hanga i ngā rohe momo-P i runga i ngā papa silicon. Ka taea hoki te whakamahi hei whakairo i ngā rauemi pēnei i te GaAs, Si, AlN, me te pūtake boron i roto i ētahi tono motuhake. Hei tāpiri, he whānuitia te whakamahinga o te Boron trichloride i roto i te tukatuka whakarewa, te ahumahi karāhe, te tātari matū me te rangahau taiwhanga.

Te Haumaru o te Boron Trichloride

Poroni trichlorideHe waikura, he paitini hoki, ā, ka pā kino ki ngā kanohi me te kiri. Ka waikura i roto i te hau makuku hei tuku i te hau hauwai hauota paitini. Nō reira, me mahi ngā mahi haumaru e tika ana i te wā e whakamahia anaPoroni trichloride, tae atu ki te mau i ngā kākahu tiaki, i ngā mōhiti kanohi me ngā taputapu tiaki manawa, me te mahi i roto i te taiao e pai ana te hau.