Ko te "Te pono, te auahatanga, te kaha, me te kaha" ko te whakaaro tonu o ta maatau whakahaere mo taua wa roa ki te whakatu tahi me nga kaihoko mo te tauutuutu me te whai hua tahi mo te Rarangi Utu Utu mo nga hau motuhake Haina Whakawhiwhi Irahiko / Semiconductor Grade 99.999% Purity Carbon. Tetrafluoride/Tetrafluoromethane CF4 Gas Utu, I te mea he kamupene e piki haere ana, kare pea matou i te tino whai hua, engari kei te ngana tonu matou ki te noho hei hoa tino pai ki a koe.
"Ko te pono, te auahatanga, te kaha, me te kaha" ko te whakaaro tonu o ta maatau whakahaere mo taua wa roa ki te whakatu tahi me nga kaihoko mo te utu tahi me te painga mo tetahi.Haina CF4 me CF4 Gas, “Waihanga Uara, Kaihoko Kaihoko!” ko ta tatou whainga. E tino tumanako ana matou ka whakapumau nga kaihoko katoa mo te wa roa me te mahi tahi ki a matou.Mena kei te pirangi koe ki te tiki atu korero mo ta maatau kamupene, Tena koa whakapiri mai ki a maatau inaianei!
Whakatakotoranga | 99.999% |
Oxygen+Argon | ≤1ppm |
hauota | ≤4 ppm |
Makuku(H2O) | ≤3 ppm |
HF | ≤0.1 ppm |
CO | ≤0.1 ppm |
CO2 | ≤1 ppm |
SF6 | ≤1 ppm |
Haocarbine | ≤1 ppm |
Nga poke katoa | ≤10 ppm |
Ko te waro tetrafluoride he hauwai hauhau me te tauira matū CF4. Ka taea te whakaaro he hauwai waro, he mewaro, he perfluorocarbon, he puhui parakore ranei. Ko te waro tetrafluoride he hau kore tae me te haunga kore, karekau e rewa ki te wai, memeha ki te benzene me te chloroform. Ka noho pumau i raro i te pāmahana me te pehanga noa, karohia nga waikura kaha, nga rawa muramura, muramura ranei. Ko te hau e kore e mura, ka piki ake te pehanga o roto o te ipu ina pa ana ki te wera nui, a he kino te pakaru me te pahū. He matū pūmau me te kore e mura. Ka taea e te reagent whakarewa haukini-konutai wai anake te mahi i te pāmahana rūma. Ko te waro tetrafluoride he hau e puta ai te paanga kati. He tino pumau, ka taea te noho roa ki roto i te hau mo te wa roa, he hau kati kati tino kaha. Ka whakamahia te waro tetrafluoride i roto i te tukanga tarai plasma o nga momo iahiko whakauru. Ka whakamahia ano he hau laser, ka whakamahia i roto i nga whakamahana iti-mahana, nga whakarewa, nga hinu, nga mea whakamahana, me nga mea whakamahana mo nga kaitoro infrared. Ko te hau etching plasma tino whakamahia i roto i te ahumahi microelectronics. Ko te ranunga o te tetrafluoromethane hau parakore teitei me te tetrafluoromethane hau parakore teitei me te hāora tino parakore. Ka taea te whakamahi whanui i roto i te silicon, te hauhautanga silicon, te nitride silicon, me te karaihe phosphosilicate. Ko te whakairo o nga taonga kiriata angiangi penei i te tungsten me te tungsten kei te whakamahia nuitia i roto i te horoi o te mata o nga taputapu hiko, te hanga pūtau solar, te hangarau laser, te whakamahana iti-mahana, te tirotiro i te turuturu, me te horoi horoi i roto i te whakaputa ara iahiko. Ka whakamahia hei whakamahana iti-mahana me te hangarau whakamaroke plasma mo nga iahiko whakauru. Whakatupato mo te rokiroki: Rokiroki i roto i te whare putunga hau hauhautanga, hau kore-whakaahu. Kia matara atu i te ahi me nga puna wera. Ko te pāmahana rokiroki kia kaua e neke ake i te 30°C. Me penapena motuhake mai i nga mea ngeru (whakaahu) me nga waikura, me te karo i te rokiroki whakauru. Ko te waahi rokiroki me whakauru ki nga taputapu maimoatanga ohorere leakage.
① Refrigerant:
I etahi wa ka whakamahia te Tetrafluoromethane hei whakamahana mahana iti.
② Te tuhi:
Ka whakamahia i roto i te miihini miihini hiko anake, i te whakakotahitanga ranei me te hāora hei etchant plasma mo te silicon, silicon dioxide, me te silicon nitride.
Hua | Carbon Tetrafluoride CF4 | ||
Rahi mokete | 40Ltr Potakaro | 50Ltr Potakaro | |
Whakakī Taumaha Kupenga/Cyl | 30Kgs | 38Kgs | |
QTY I utaina ki te 20'Ipu | 250 Kiriata | 250 Kiriata | |
Taumaha Net Tapeke | 7.5 Tane | 9.5 Tona | |
Taumaha Tare Porotakaro | 50Kgs | 55Kgs | |
Takirere | CGA 580 |
①High pure, whare hou;
②Ko te kaihanga tiwhikete ISO;
③Te tuku tere;
④Ko te punaha tātari-a-ipurangi mo te whakahaere kounga i ia taahiraa;
⑤Ko te hiahia nui me te tukanga tino pai mo te whakahaere i te rango i mua i te whakakii;