| Whakatakotoranga | 99.999% |
| Hāora+Ākona | ≤1ppm |
| Hauota | ≤4 ppm |
| Makuku (H2O) | ≤3 ppm |
| HF | ≤0.1 ppm |
| CO | ≤0.1 ppm |
| CO2 | ≤1 ppm |
| SF6 | ≤1 ppm |
| Ngā Halocarbynes | ≤1 ppm |
| Ngā poke katoa | ≤10 ppm |
Ko te waro tetrafluoride he warowaihā whakakōkō me te tātai matū CF4. Ka taea te kī he warowaihā whakakōkō, he methane whakakōkō, he warowaihā perfluorocarbon, he matū kore-waro rānei. Ko te waro tetrafluoride he hau kore tae, kāore e wairewa i te wai, e wairewa ana i te benzene me te chloroform. Ka pumau i raro i te pāmahana me te pēhanga noa, karohia ngā waikura kaha, ngā rauemi mura, ngā mea mura rānei. Ki te hau kore-mura, ka piki ake te pēhanga o roto o te ipu ina pāngia e te wera nui, ā, kei reira te tūponotanga o te pakaru me te pahū. He pumau te matū, ā, kāore e mura. Ko te wai ammonia-konutai whakarewa anake ka taea te mahi i te pāmahana rūma. Ko te waro tetrafluoride he hau e puta ai te pānga kati kōtuhi. He tino pumau, ka taea te noho ki te hau mō te wā roa, ā, he hau kati kōtuhi tino kaha. Ka whakamahia te waro tetrafluoride i roto i te tukanga whakairo plasma o ngā momo ara iahiko whakauru. Ka whakamahia hoki hei hau reera, ā, ka whakamahia i roto i ngā pouaka whakamatao pāmahana-iti, ngā whakarewa, ngā hinu whakahinuhinu, ngā rauemi ārai, me ngā whakamatao mō ngā taputapu kite whero-whero. Koinei te hau whakairo plasma e whakamahia nuitia ana i roto i te umanga hikohiko iti. He ranunga o te hau tetrafluoromethane parakore teitei me te hau tetrafluoromethane parakore teitei me te hāora parakore teitei. Ka taea te whakamahi whānuitia i roto i te silicon, te hauhā silicon, te silicon nitride, me te karāhe phosphosilicate. Ko te whakairo o ngā rauemi kiriata angiangi pēnei i te tungsten me te tungsten ka whakamahia whānuitia hoki i roto i te horoi mata o ngā taputapu hiko, te hanga pūtau solar, te hangarau reera, te pouaka whakamatao pāmahana-iti, te tirotiro turuturu, me te hopi horoi i roto i te hanga ara iahiko tā. Ka whakamahia hei pouaka whakamatao pāmahana-iti me te hangarau whakairo maroke plasma mō ngā ara iahiko whakauru. Ngā whakatūpato mō te rokiroki: Penapena ki roto i te whare putunga hau hauhautanga, hauhautanga, kore-kākā. Puritia kia matara atu i te ahi me ngā pūtake wera. Kaua te pāmahana rokiroki e neke ake i te 30°C. Me rongoa motuhake mai i ngā mea mura ngāwari (kātahi ka mura) me ngā waikura, ā, kaua e whakaranua ngā momo rokiroki. Me whai taputapu rongoā ohorere turuturu te wāhi rokiroki.
① Pūmahana Whakamatao:
I ētahi wā ka whakamahia te Tetrafluoromethane hei rongoā whakamatao pāmahana iti.
② Te whakairo:
E whakamahia ana i roto i te hanga moroiti hikohiko anake, i te whakakotahitanga rānei me te hāora hei whakairo plasma mō te silicon, te silicon dioxide, me te silicon nitride.
| Hua | Tetrafluoride WaroCF4 | ||
| Rahi o te Mōkihi | Pūwero 40Lt | Pūwero 50Ltr | |
| Taumaha Kupenga Whakakī/Hiko | 30Kg | 38Kg | |
| RAHIA I Utaina ki roto i te Ipu 20' | 250 Cyls | 250 Cyls | |
| Taumaha Kupenga Katoa | 7.5 Tana | 9.5 Tana | |
| Taumaha Tāra Puoto | 50Kg | 55Kg | |
| Takirere | CGA 580 | ||
①Te parakore teitei, te whare hou rawa atu;
②Kaihanga tiwhikete ISO;
③Tukunga tere;
④Pūnaha tātari ipurangi mō te whakahaere kounga i ia taahiraa;
⑤He nui te whakaritenga me te tukanga tino tupato mo te whakahaere i te rango i mua i te whakakī;